Dr. Yong Jai Cho Profile

Dr. Yong Jai Cho

Principal Research Scientist at Korea Research Institute of Standards and Science

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Publications (10)

Proceedings Article | 10 April 2024 Presentation + Paper

High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer

Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Inho Choi, Won Chegal, Yongjai Cho, Daesuk Kim

Proceedings Volume 12955, 129550F (2024) https://doi.org/10.1117/12.3010995

KEYWORDS: 2D materials, Inspection, Imaging systems, Visualization, Spatial resolution, Metrology

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Proceedings Article | 10 August 2023 Poster

Results of uncertainty evaluation on the thickness and refractive index spectrum measurement of silicon dioxide thin film layer using a spectroscopic ellipsometer

Yong Jai Cho, Won Chegal, Junho Choi

Proceedings Volume PC12619, PC126190D (2023) https://doi.org/10.1117/12.2673375

KEYWORDS: Measurement uncertainty, Thin films, Film thickness, Silica, Refractive index, Spectroscopy, Standards development, Semiconductors, Semiconductor manufacturing, Quality control

Proceedings Article | 18 April 2013 Paper

Roughness of EUV resists exposed to EUV, ArF and KrF radiation as evaluated using three tools: spectroscopic ellipsometry, AFM and SEM

Byong Chon Park, Yong Jai Cho, Insung Kim, Jeongho Yeo

Proceedings Volume 8681, 86812K (2013) https://doi.org/10.1117/12.2011677

KEYWORDS: Extreme ultraviolet lithography, Semiconducting wafers, Line edge roughness, Extreme ultraviolet, Scanning electron microscopy, Atomic force microscopy, Spectroscopic ellipsometry, Photoresist processing, Calibration, Critical dimension metrology

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Proceedings Article | 13 September 2011 Paper

Kinetic analysis of biomolecular interactions by surface plasmon enhanced ellipsometry

Hyun Mo Cho, Won Chegal, Yong Jai Cho, Jong Myoung Won, Hak Min Lee, Jae Heung Jo

Proceedings Volume 8099, 80990U (2011) https://doi.org/10.1117/12.892309

KEYWORDS: Sensors, Ellipsometry, Refractive index, Phase measurement, Biological research, Biosensors, Gold, Metals, Surface plasmons, Calibration

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Proceedings Article | 23 August 2011 Paper

Phase-image-correlation-based high sensitive optical nanoscope

Daesuk Kim, Byung Joon Baek, Andrei Zvyagin, Hyungchul Lee, Yong Jai Cho

Proceedings Volume 8173, 81730S (2011) https://doi.org/10.1117/12.899605

KEYWORDS: Image filtering, 3D metrology, Phase measurement, Defect inspection, Diffraction, Semiconductors, Inspection, Time metrology, Metrology, CCD cameras

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Proceedings Article | 17 November 2005 Paper

Enhancement of biomolecular detection sensitivity by surface plasmon resonance ellipsometry

Hyun Mo Cho, Won Chegal, Yong Jai Cho, Young-pil Kim, Hak-sung Kim

Proceedings Volume 6008, 60081F (2005) https://doi.org/10.1117/12.630379

KEYWORDS: Ellipsometry, Gold, Phase measurement, Refractive index, Data modeling, Surface plasmons, Imaging systems, Chromium, Thin films, Prisms

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Proceedings Article | 17 November 2005 Paper

Imaging ellipsometry combined with surface plasmon resonance for real-time biospecific interaction analysis

Won Chegal, Hyun Mo Cho, Yong Jai Cho, Young Pil Kim, Hak Sung Kim

Proceedings Volume 6008, 60081G (2005) https://doi.org/10.1117/12.630448

KEYWORDS: Ellipsometry, Surface plasmons, Reflection, Sensors, Gold, Glasses, Refractive index, Biological research, Prisms, Thin films

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Proceedings Article | 14 February 2005 Paper

Fast data acquisition in imaging ellipsometry using four-frame method

Won Chegal, Yong Jai Cho, Hyun Mo Cho, Yun Woo Lee, Soo Hyun Kim

Proceedings Volume 5634, (2005) https://doi.org/10.1117/12.576807

KEYWORDS: Ellipsometry, Time metrology, Spectrographs, Fourier transforms, Imaging spectroscopy, Polarization, Polarizers, Spectroscopy, Sensors, Thin films

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Proceedings Article | 15 October 2004 Paper

Azimuth calibration method in ellipsometer with imaging spectrograph

Won Chegal, Yong Jai Cho, Hyun Jong Kim, Hyun Mo Cho, Yun Woo Lee, Soo Hyun Kim

Proceedings Volume 5546, (2004) https://doi.org/10.1117/12.559382

KEYWORDS: Spectrographs, Calibration, Imaging spectroscopy, Ellipsometry, Sensors, Polarization, Signal detection, Optical testing, Spectroscopy, Thin films

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Proceedings Article | 14 October 2004 Paper

Determination of optical properties of titanium dioxide thin films on different substrates by using spectroscopic ellipsometry

Hyun Jong Kim, Yong Jai Cho, Hyun Mo Cho, Won Chegal, Yun Woo Lee, Sang Youl Kim

Proceedings Volume 5538, (2004) https://doi.org/10.1117/12.559427

KEYWORDS: Refractive index, Thin films, Silicon, Silicon films, Optical properties, Crystals, Spectroscopic ellipsometry, Dispersion, Thin film growth, Titanium dioxide

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Showing 5 of 10 publications

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