Dr. Yong Jai Cho
Principal Research Scientist at Korea Research Institute of Standards and Science
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 18 April 2013 Paper
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Calibration, Atomic force microscopy, Scanning electron microscopy, Spectroscopic ellipsometry, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Line edge roughness, Photoresist processing, Semiconducting wafers

Proceedings Article | 13 September 2011 Paper
Proc. SPIE. 8099, Biosensing and Nanomedicine IV
KEYWORDS: Gold, Ellipsometry, Refractive index, Surface plasmons, Sensors, Calibration, Metals, Biosensors, Biological research, Phase measurement

Proceedings Article | 23 August 2011 Paper
Proc. SPIE. 8173, Photonics 2010: Tenth International Conference on Fiber Optics and Photonics
KEYWORDS: Semiconductors, Diffraction, Metrology, Inspection, CCD cameras, Time metrology, 3D metrology, Image filtering, Phase measurement, Defect inspection

Proceedings Article | 17 November 2005 Paper
Proc. SPIE. 6008, Nanosensing: Materials and Devices II
KEYWORDS: Gold, Thin films, Ellipsometry, Refractive index, Prisms, Surface plasmons, Reflection, Sensors, Glasses, Biological research

Proceedings Article | 17 November 2005 Paper
Proc. SPIE. 6008, Nanosensing: Materials and Devices II
KEYWORDS: Gold, Thin films, Ellipsometry, Refractive index, Prisms, Surface plasmons, Data modeling, Imaging systems, Chromium, Phase measurement

Showing 5 of 8 publications
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