Dr. Yong Jin Cho Profile

Dr. Yong Jin Cho

at SAMSUNG Electronics Co Ltd

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Author

Publications (3)

Proceedings Article | 11 December 2009 Paper

In-shot (intra-field) overlay measurement considering overlay mark pattern dependency and illumination source dependency

Dong-han Lee, Jang-sun Kim, Gil-jin Lee, Sang-ho Lee, Yong-jin Cho, Young-Seog Kang, Woo-Sung Han

Proceedings Volume 7520, 752019 (2009) https://doi.org/10.1117/12.839675

KEYWORDS: Overlay metrology, Distortion, Control systems, Reticles, Nonlinear control, Scanners, Image segmentation, Complex systems, Double patterning technology, Optical lithography

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Proceedings Article | 4 March 2008 Paper

SEM contour-based model OPC calibrated with optically sensitive patterns

Jee-Eun Jung, Mi-Kyeong Lee, Yong-Jin Cho, Sang-Ho Lee, Young-Seog Kang, Young-Kyou Park

Proceedings Volume 6925, 692516 (2008) https://doi.org/10.1117/12.772485

KEYWORDS: Scanning electron microscopy, Optical proximity correction, Calibration, Data modeling, Optical calibration, Image analysis, Critical dimension metrology, Process modeling, Feature extraction, Image processing

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Proceedings Article | 20 May 2006 Paper

Real time analysis of the haze environment trapped between the pellicle film and the mask surface

Jaehyuck Choi, Seungyeon Lee, Yongjin Cho, Sunghun Ji, Byung Cheol Cha, Sung Woon Choi, Woo Sung Han

Proceedings Volume 6283, 62830A (2006) https://doi.org/10.1117/12.681736

KEYWORDS: Air contamination, Pellicles, Photomasks, Fluorine, Chemical analysis, Ions, Argon, Oxygen, Carbon monoxide, Statistical analysis

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