CONFERENCE PROCEEDINGS
Advanced Search
Yong Min Cho
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 11 December 2009 Paper
After development inspection (ADI) studies of photo resist defectivity of an advanced memory device
Hyung-Seop Kim, Yong Min Cho, Byoung-Ho Lee, Roland Yeh, Eric Ma, Fei Wang, Yan Zhao, Kenichi Kanai, Hong Xiao, Jack Jau
Proceedings Volume 7520, 75200J (2009) https://doi.org/10.1117/12.837103
KEYWORDS: Inspection, Reticles, Semiconducting wafers, Optical inspection, Bridges, Wafer inspection, Defect inspection, Finite element methods, Scanning electron microscopy, Optical lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top