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Yong Shang
at Hebei Univ
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Author
Publications (4)
Proceedings Article | 20 September 2002 Paper
Synthesis of diamond films at low temperature and study of nonlinear dynamic synthesis process
Qingxun Zhao, Yong Shang, Lifang Dong, Guangsheng Fu, Zheng Yan, Jingfa Yang
Proceedings Volume 4919, (2002) https://doi.org/10.1117/12.465651
KEYWORDS: Diamond, Nonlinear dynamics, Plasma, Signal processing, Emission spectroscopy, Temperature metrology, Chemical vapor deposition, Diagnostics, Process modeling
Proceedings Article | 20 September 2002 Paper
Synthesis of thin diamond films on Si substrate by the means of near-surface glow discharge CVD
Yong Shang, Lifang Dong, Boqin Ma
Proceedings Volume 4919, (2002) https://doi.org/10.1117/12.465648
KEYWORDS: Diamond, Silicon, Chemical vapor deposition, Crystals, Scanning electron microscopy, Raman spectroscopy, Silicon films, X-ray diffraction, Thin films, Methane
Proceedings Article | 12 September 2002 Paper
Deposition of nanocrystalline diamond films by excimer laser ablation of carbon
Qingxun Zhao, Lifang Dong, Guangsheng Fu, Yong Shang, Yinshun Wang, Yongjie Wang
Proceedings Volume 4915, (2002) https://doi.org/10.1117/12.482889
KEYWORDS: Diamond, Plasma, Laser ablation, Raman spectroscopy, Carbon, Hydrogen, Silicon, Excimer lasers, Chemical vapor deposition, Methane
Proceedings Article | 19 October 2001 Paper
Diamond deposition at low temperature by EACVD
Proceedings Volume 4580, (2001) https://doi.org/10.1117/12.444935
KEYWORDS: Diamond, Hydrogen, Chemical vapor deposition, Scanning electron microscopy, X-ray diffraction, Molecules, Raman spectroscopy, Carbon, Chemical species, Silicon carbide
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