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Yongduk Kim
at Kyungpook National Univ
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Publications (1)
Proceedings Article | 19 November 2001 Paper
Design of the rf-MEMS voltage-tunable capacitor for wide tunable range
Yongduk Kim, Sekwang Park
Proceedings Volume 4593, (2001) https://doi.org/10.1117/12.448861
KEYWORDS: Capacitors, Capacitance, Microelectromechanical systems, Silicon, Gold, Optical lithography, Low pressure chemical vapor deposition, Structural design, Calibration, Electrodes
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