On the basis of theoretical analysis of biaxial birefringent thin films, this study investigates the optical
properties of phase shift on reflection and/or transmission through slanted columnar TiO2 sculptured
anisotropic thin film (ATF) deposited with glancing angle deposition (GLAD) technique via reactive
electron-beam evaporation. The tilted nanocolumn microstructures of thin film induce the optical
anisotropy. The optical constants dispersion equations of TiO2 ATF are determined from fitting the
transmittance spectra for s- and p-polarized waves measured at normal and oblique incidence within
400-1200nm. With the extracted structure parameters, the phase shifts of polarized light are analyzed
with the characteristic matrix and then measured with spectroscopic ellipsometry in the deposition
plane. A reasonably good agreement between the theoretical studies and experimental measurements is
obtained. In addition, the dependence of the phase shift on oblique incidence angle is also discussed.
The results show a greater generality and superiority of the characteristic matrix method. Birefringence
of the biaxial ATF performed a sophisticated phase modulation with varied incidence angles over a
broad range to have a wide-angle phase shift.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.