Mr. Yoshihide Kihara Profile

Yoshihide Kihara

at Tokyo Electron Miyagi Ltd

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Publications (3)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

EUV defect reduction activities using coater/developer and etching technique

Takahiro Shiozawa, Keisuke Yoshida, Noriaki Nagamine, Arnaud Dauendorffer, Satoru Shimura, Kathleen Nafus, Yannick Feurprier, Kenta Ono, Shota Yoshimura, Atsutoshi Inokuchi, Kiyoshi Maeda, Tetsuya Nishizuka, Shinya Morikita, Yoshihide Kihara, Ken Kobayashi

Proceedings Volume 11612, 116120T (2021) https://doi.org/10.1117/12.2583772

KEYWORDS: Extreme ultraviolet, Etching, Extreme ultraviolet lithography, Stochastic processes, Photoresist processing, Particles, Lithographic illumination, High volume manufacturing

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Proceedings Article | 23 March 2020 Paper

Novel etch technologies utilizing atomic layer process for advanced patterning

Masanobu Honda, Takayuki Katsunuma, Sho Kumakura, Toru Hisamatsu, Yoshihide Kihara

Proceedings Volume 11329, 1132905 (2020) https://doi.org/10.1117/12.2555805

KEYWORDS: Etching, Ions, Silicon carbide, Silicon, Critical dimension metrology, Photomasks, Plasma, Atomic layer deposition, Optical lithography, Plasma etching

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Proceedings Article | 20 March 2019 Presentation + Paper

Integrated atomic scale CD control and local variability reduction techniques

Toru Hisamatsu, Takayuki Katsunuma, Yoshihide Kihara, Masanobu Honda

Proceedings Volume 10963, 109630B (2019) https://doi.org/10.1117/12.2513832

KEYWORDS: Optical lithography, Etching, Critical dimension metrology, Process control, Photomasks, Extreme ultraviolet, Lithography, Logic, Extreme ultraviolet lithography, Multilayers

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