Prof. Yoshihiro Kangawa Profile

Prof. Yoshihiro Kangawa

Professor at Kyushu Univ

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Publications (1)

Proceedings Article | 5 March 2021 Presentation

Impurity incorporation mechanism in GaN MOVPE: ab initio-based approach

Yoshihiro Kangawa

Proceedings Volume 11686, 116861E (2021) https://doi.org/10.1117/12.2577463

KEYWORDS: Gallium nitride, Vapor phase epitaxy, Process modeling, Light emitting diodes, Thin films, Thin film growth, Solid phase epitaxy, Semiconductors, Semiconductor lasers, Reliability

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