Prof. Yoshiki Nakata Profile

Prof. Yoshiki Nakata

Associate Professor at Osaka Univ

SPIE Involvement:

Conference Program Committee | Author | Editor

Publications (41)

Proceedings Article | 5 March 2021 Presentation

Single shot deposition of nanodot array by laser-induced forward transfer using interference pattern

Yoshiki Nakata, Eiki Hayashi, Koji Tsubakimoto, Hiroyuki Shiraga, Aiko Narazaki, Tatsuya Shoji, Kenta Ushiro, Yasuyuki Tsuboi

Proceedings Volume 11674, 116740S (2021) https://doi.org/10.1117/12.2587150

KEYWORDS: Plasmonics, Light harvesting, Laser processing, Gold, Femtosecond phenomena, Array processing

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Proceedings Article | 27 February 2017 Paper

Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing

Kazuhito Osawa, Masataka Yoshida, Yoshiki Nakata, Noriaki Miyanaga, Aiko Narazaki, Tatsuya Shoji, Yasuyuki Tsuboi

Proceedings Volume 10091, 100911C (2017) https://doi.org/10.1117/12.2253983

KEYWORDS: Beam shaping, Laser processing, Optical filters, Spatial light modulators, Spatial frequencies, Spatial filters, Femtosecond phenomena, Fabrication, Signal attenuation, Phase shift keying

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Proceedings Article | 1 May 2015 Paper

World's largest high energy petawatt laser LFEX as a user's facility

H. Shiraga, N. Miyanaga, J. Kawanaka, S. Tokita, T. Jitsuno, Y. Nakata, S. Fujioka, H. Azechi

Proceedings Volume 9515, 95150S (2015) https://doi.org/10.1117/12.2181654

KEYWORDS: Optical amplifiers, Picosecond phenomena, Mirrors, Fusion energy, Physics, Pulsed laser operation, Fiber amplifiers, Diffraction gratings, Laser energy, Laser irradiation

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Proceedings Article | 13 March 2015 Paper

Fabrication of ZnO crystals by UV-laser annealing on ZnO nanoparticles prepared by laser ablation method

T. Shimogaki, H. Kawahara, M. Higashihata, H. Ikenoue, D. Nakamura, Y. Nakata, T. Okada

Proceedings Volume 9364, 93640C (2015) https://doi.org/10.1117/12.2078849

KEYWORDS: Zinc oxide, Nanoparticles, Crystals, Annealing, Laser crystals, Nanocrystals, Ultraviolet radiation, Scanning electron microscopy, Laser ablation, Nanowires

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Proceedings Article | 6 March 2014 Paper

Shape-controlled ZnO nanocrystals using multi-beam interference irradiation

D. Nakamura, T. Shimogaki, Y. Muraoka, S. Nakao, K. Harada, M. Higashihata, Y. Nakata, T. Okada

Proceedings Volume 8967, 89671G (2014) https://doi.org/10.1117/12.2039732

KEYWORDS: Zinc oxide, Nanocrystals, Sapphire, Gallium nitride, Ultraviolet radiation, Scanning electron microscopy, Nanostructures, Optoelectronics, Electron beam lithography, Nanowires

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Proceedings Article | 13 March 2013 Paper

Growth of periodic ZnO nano-crystals on buffer layer patterned by interference laser irradiation

D. Nakamura, T. Shimogaki, K. Okazaki, M. Higashihata, Y. Nakata, T. Okada

Proceedings Volume 8607, 860703 (2013) https://doi.org/10.1117/12.2002961

KEYWORDS: Zinc oxide, Laser irradiation, Scanning electron microscopy, Ultraviolet radiation, Optoelectronics, Nanocrystals, Pulsed laser deposition, Sapphire, Nd:YAG lasers, Nanowires

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Proceedings Article | 4 December 2012 Paper

Influences of oil-contamination on LIDT and optical properties in dielectric coatings

H. Murakami, T. Jitsuno, S. Motokoshi, E. Sato, K. Mikami, K. Kato, T. Kawasaki, Y. Nakata, N. Sarukura, T. Shinizu, H. Shiraga, N. Miyanaga, H. Azechi

Proceedings Volume 8530, 853024 (2012) https://doi.org/10.1117/12.977705

KEYWORDS: Contamination, Optical coatings, Mirrors, Dielectrics, Nitrogen, Optical properties, Dielectric mirrors, Laser induced damage, Silica, Metals

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Proceedings Article | 16 February 2012 Paper

Generation of new nanostructures in designed matrix by interfering femtosecond laser processing

K. Momoo, K. Sonoda, Y. Nakata, N. Miyanaga

Proceedings Volume 8243, 82431E (2012) https://doi.org/10.1117/12.909819

KEYWORDS: Phase shifts, Double patterning technology, Nanostructures, Femtosecond phenomena, Laser processing, Metals, Metamaterials, Optical simulations, Nanolithography, Structural design

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Proceedings Article | 22 February 2011 Paper

Generation of complicated or duplicated structure by interfering femtosecond laser processing of metallic thin film

T. Hiromoto, K. Momoo, Y. Nakata, N. Miyanaga

Proceedings Volume 7920, 792013 (2011) https://doi.org/10.1117/12.874407

KEYWORDS: Femtosecond phenomena, Phase shifts, Thin films, Laser processing, Double patterning technology, Nanostructures, Diffractive optical elements, Optical simulations, Laser engineering, Pulsed laser operation

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Proceedings Article | 22 February 2011 Paper

Generation of superfine structure smaller than 10 nm by interfering femtosecond laser processing

Y. Nakata, K. Momoo, T. Hiromoto, N. Miyanaga

Proceedings Volume 7920, 79200B (2011) https://doi.org/10.1117/12.881184

KEYWORDS: Phase shifts, Thin films, Femtosecond phenomena, Gold, Beam splitters, Liquids, Metamaterials, Sapphire, Thin film deposition, Laser irradiation

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Proceedings Article | 6 December 2010 Paper

Oil-contamination problem in large-scale pulse-compressor

T. Jitsuno, H. Murakami, S. Motokoshi, E. Saato, K. Mikami, K. Kato, T. Kawasaki, Y. Nakata, N. Sarukura, T. Shinizu, H. Shiraga, N. Miyanaga, H. Azechi

Proceedings Volume 7842, 784221 (2010) https://doi.org/10.1117/12.867528

KEYWORDS: Contamination, Silica, Mirrors, Optical components, Laser damage threshold, Optical coatings, Pulsed laser operation, Laser applications, Laser induced damage, Photography

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Proceedings Article | 18 February 2010 Paper

Effect of target structure on interfering femtosecond laser processing

Y. Nakata, T. Hiromoto, N. Miyanaga

Proceedings Volume 7584, 75840H (2010) https://doi.org/10.1117/12.845963

KEYWORDS: Gold, Silver, Thin films, Silica, Femtosecond phenomena, Glasses, Laser processing, Scanning electron microscopy, Thin film deposition, Beam splitters

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Proceedings Article | 25 February 2009 Paper

Low-stress dicing assisted by pulsed laser for multilayer MEMS

Masayuki Fujita, Yusaku Izawa, Yosuke Tsurumi, Shuji Tanaka, Hideyuki Fukushi, Keiichi Sueda, Yoshiki Nakata, Noriaki Miyanaga, Masayoshi Esashi

Proceedings Volume 7202, 72020F (2009) https://doi.org/10.1117/12.808370

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Glasses, Silicon, Pulsed laser operation, Fiber lasers, Laser applications, Semiconductor lasers, Neodymium lasers, Carbon dioxide lasers

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Proceedings Article | 24 February 2009 Paper

Generation of nanostructured surfaces by interfering and no-interfering ultra-short pulse laser processing

Y. Nakata, K. Tsuchida, N. Miyanaga

Proceedings Volume 7201, 72011F (2009) https://doi.org/10.1117/12.813673

KEYWORDS: Laser processing, Femtosecond phenomena, Thin films, Gold, Picosecond phenomena, Crystals, Pulsed laser operation, Silicon, Nanostructures, Beam splitters

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Proceedings Article | 1 March 2006 Paper

Generation of new nanomaterials by interfering femtosecond laser processing and its applications

Yoshiki Nakata

Proceedings Volume 6106, 61060M (2006) https://doi.org/10.1117/12.655159

KEYWORDS: Femtosecond phenomena, Thin films, Nanomaterials, Optical correlators, Beam splitters, Gold, Aluminum, Scanning electron microscopy, Materials processing, Laser ablation

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Proceedings Article | 12 April 2005 Paper

Optical and electrical properites of ZnO nanorods synthesized by nanoparticle assisted pulsed-laser deposition

Tatsuo Okada, Kou Kawashima, Minoru Ueda, Yoshiki Nakata

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.591412

KEYWORDS: Zinc oxide, Crystals, Scanning electron microscopy, Sapphire, Crystallography, Laser crystals, Charged particle optics, Laser ablation, Nanorods, Nanowires

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Proceedings Article | 8 October 2004 Paper

Generation of nanosized materials by processing of thin film by interfering femtosecond laser beams

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 5662, (2004) https://doi.org/10.1117/12.596774

KEYWORDS: Femtosecond phenomena, Thin films, Gold, Beam splitters, Laser ablation, Aluminum, Laser systems engineering, Electrical engineering, Materials processing, Nanomaterials

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Proceedings Article | 20 September 2004 Paper

Synthesis of nanostructured ZnO by laser ablation in a background gas

Tatsuo Okada, Kou Kawashima, Yoshiki Nakata

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.547501

KEYWORDS: Zinc oxide, Crystals, Scanning electron microscopy, Nanoparticles, Laser ablation, Luminescence, Particles, Thin films, Laser crystals, Nanorods

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Proceedings Article | 15 July 2004 Paper

Nanoparticle-assisted laser ablation deposition of nanostructured ZnO crystals

Tatsuo Okada, Agung Budi Hartanto, Yoshiki Nakata

Proceedings Volume 5339, (2004) https://doi.org/10.1117/12.529856

KEYWORDS: Zinc oxide, Crystals, Scanning electron microscopy, Laser ablation, Luminescence, Laser crystals, Nanoparticles, Oxygen, Thin films, Nanorods

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Proceedings Article | 15 July 2004 Paper

Generation of uniformly spaced and nanosized structures by interfering femtosecond laser beams

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 5339, (2004) https://doi.org/10.1117/12.531639

KEYWORDS: Femtosecond phenomena, Beam splitters, Laser ablation, Thin films, Scanning electron microscopy, Optical correlators, Coherent optics, Beam shaping, Nanomaterials, Mirrors

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Proceedings Article | 2 April 2004 Paper

Lithographic fabrication of microstructures by laser ablation using femtosecond laser

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 5399, (2004) https://doi.org/10.1117/12.552809

KEYWORDS: Photomasks, Femtosecond phenomena, Laser ablation, Lithography, Thin films, Lenses, Laser processing, Gold, Laser systems engineering, Scanning electron microscopy

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Proceedings Article | 2 April 2004 Paper

Microscopic and spectroscopic imaging of laser-induced forward transfer and its application to material transfer

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 5399, (2004) https://doi.org/10.1117/12.552818

KEYWORDS: Laser ablation, Gold, Chemical species, Luminescence, Dye lasers, Laser energy, Laser scattering, Thin films, Laser processing, Particles

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Proceedings Article | 18 November 2003 Paper

Transcriptional ablation using femtosecond laser with mask

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 5063, (2003) https://doi.org/10.1117/12.540518

KEYWORDS: Photomasks, Femtosecond phenomena, Laser ablation, Thin films, Gold, Lithography, Lenses, Materials processing, Electrical engineering, Glasses

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Proceedings Article | 17 October 2003 Paper

Synthesis of metal oxide nanoparticles by laser ablation: nanoparticle-assisted deposition of nanostructured ZnO

Tatsuo Okada, Mitsuhisa Kawakami, Agung Budi Hartanto, Yoshiki Nakata

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479530

KEYWORDS: Zinc oxide, Nanoparticles, Crystals, Laser ablation, Scanning electron microscopy, Oxygen, Metals, Oxides, Thin films, Nanorods

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Proceedings Article | 17 October 2003 Paper

Holographic fabrication of micron structures using interfered femtosecond laser beams split by diffractive optics

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479546

KEYWORDS: Femtosecond phenomena, Laser ablation, Beam splitters, Gold, Glasses, Diffraction, Laser energy, Silica, Reflection, Nanowires

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Proceedings Article | 19 February 2003 Paper

Diagnostics of particle dynamics during deposition of optically functional thin films by laser ablation

Tatsuo Okada, Yoshiki Nakata, Mitsuo Maeda

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486536

KEYWORDS: Particles, Laser ablation, Laser induced fluorescence, Visualization, Chemical species, Silicon, Zinc oxide, Molecules, Diagnostics, Thin films

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Proceedings Article | 19 February 2003 Paper

Deposition of LiNbO3 waveguide by pulsed-laser deposition

Yoshiki Nakata, Soichiro Gunji, Youhei Shimizu, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486589

KEYWORDS: Waveguides, Laser ablation, Crystals, Refractive index, Thin films, Scattering, Prisms, Laser scattering, Sapphire, Oxygen

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Proceedings Article | 19 February 2003 Paper

Fabrication of micro and cyclic structure by using diffractive optics and femtosecond laser

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486591

KEYWORDS: Femtosecond phenomena, Laser ablation, Glasses, Beam splitters, Sapphire, Gold, Laser energy, Laser optics, Microfabrication, Thin films

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Proceedings Article | 19 February 2003 Paper

Behavior of zinc oxide nanoparticles in pulsed-laser deposition

Yoshiki Nakata, Agung Hartanto, Mitsuhisa Kawakami, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486590

KEYWORDS: Nanoparticles, Zinc oxide, Oxygen, Crystals, Laser scattering, Laser ablation, Laser beam diagnostics, Imaging spectroscopy, Rayleigh scattering, Sapphire

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Proceedings Article | 29 August 2002 Paper

Energy transfer mechanism and lasing performance in rare-earth-codoped ZBLAN

Zhicong Meng, Kazuhiro Nagamatsu, Mutsuhiro Higashihata, Yoshiki Nakata, Tatsuo Okada, Yoshinori Kubota, Natsuya Nishimura, Takuya Teshima

Proceedings Volume 4905, (2002) https://doi.org/10.1117/12.481023

KEYWORDS: Erbium, Ytterbium, Cerium, Energy transfer, Glasses, Ions, Fiber lasers, ZBLAN, Luminescence, Absorption

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Proceedings Article | 18 June 2002 Paper

Application and observation of laser-induced forward transfer process

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 4637, (2002) https://doi.org/10.1117/12.470652

KEYWORDS: Atmospheric particles, Particles, Gold, Laser ablation, Dye lasers, Laser energy, Thin films, Luminescence, Laser processing, Light scattering

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Proceedings Article | 18 June 2002 Paper

Diagnostics of nanoparticle formation process by laser ablation in a background gas

Tatsuo Okada, Yoshiki Nakata, Mitsuo Maeda

Proceedings Volume 4637, (2002) https://doi.org/10.1117/12.470633

KEYWORDS: Silicon, Laser induced fluorescence, Laser ablation, Visualization, Particles, Nanoparticles, Chemical species, Rayleigh scattering, Molecules, Laser scattering

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Proceedings Article | 25 February 2002 Paper

Fabrication of Ce:YIG film with different composition by pulsed-laser deposition

Yoshiki Nakata, Yuko Tashiro, Tatsuo Okada, Mitsuo Maeda, Sadao Higuchi, Kiyotaka Ueda

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456879

KEYWORDS: Crystals, Transmittance, Gallium, Argon, Iron, Diffraction, Oxygen, Gadolinium, Yttrium, Garnet

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Proceedings Article | 29 June 2001 Paper

Ejection of particles placed on a thin film by laser-induced forward transfer

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432511

KEYWORDS: Particles, Laser ablation, Thin films, Atmospheric particles, Gold, Laser energy, Atmospheric propagation, Luminescence, Chemical species, Laser induced fluorescence

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Proceedings Article | 6 November 2000 Paper

Fabrication of Ce:YIG film for electric and magnetic field sensor by pulsed-laser deposition and laser-induced forward transfer

Yoshiki Nakata, Yuko Tashiro, Tatsuo Okada, Mitsuo Maeda, Sadao Higuchi, Kiyotaka Ueda

Proceedings Volume 4088, (2000) https://doi.org/10.1117/12.405725

KEYWORDS: Crystals, Thin films, Argon, Cerium, Transmittance, Thin film deposition, Oxygen, Garnet, Laser ablation, Chemical species

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Proceedings Article | 6 November 2000 Paper

Observation of nanoparticle formation process by two-dimensional laser-induced fluorescence, UV Rayleigh scattering, and re-decomposition laser-induced fluorescence methods

Junichi Muramoto, Takahiro Inmaru, Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 4088, (2000) https://doi.org/10.1117/12.405718

KEYWORDS: Nanoparticles, Silicon, Laser beam diagnostics, Laser induced fluorescence, Laser ablation, Chemical species, Zinc oxide, Ultraviolet radiation, Rayleigh scattering, Visualization

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Proceedings Article | 7 June 2000 Paper

Microscopic observation of laser-induced forward transfer process by two-dimensional laser-induced fluorescence technique

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 3933, (2000) https://doi.org/10.1117/12.387584

KEYWORDS: Chemical species, Laser ablation, Laser energy, Atmospheric particles, Laser processing, Gold, Particles, Reflection, Laser induced fluorescence, Thin films

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Proceedings Article | 1 February 2000 Paper

Fabrications of optically functional thin films for electric and magnetic field sensors by pulsed laser deposition

Yoshiki Nakata, Hiroshi Uetsuhara, Fumiaki Yahiro, Tatsuo Okada, Mitsuo Maeda, Kiyotaka Ueda, Sadao Higuchi

Proceedings Volume 3885, (2000) https://doi.org/10.1117/12.376975

KEYWORDS: Crystals, Oxygen, Argon, Thin films, Magnetic sensors, Glasses, Cerium, Diffraction, Yttrium, Iron

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Proceedings Article | 15 July 1999 Paper

Pulsed laser deposition of Ti:sapphire thin films using high-speed rotating target

Yoshiki Nakata, Hiroshi Uetsuhara, Satoshi Goto, Nilesh Vasa, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 3618, (1999) https://doi.org/10.1117/12.352721

KEYWORDS: Thin films, Laser ablation, Thin film deposition, Chemical species, Molecules, Waveguide lasers, Silicon, CCD cameras, Scanning electron microscopy, Crystals

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Proceedings Article | 3 June 1998 Paper

New developments of pulsed-laser deposition process

Tatsuo Okada, Yoshiki Nakata, Junichi Muramoto, Mitsuo Maeda

Proceedings Volume 3274, (1998) https://doi.org/10.1117/12.309518

KEYWORDS: Silicon, Laser ablation, Metals, Particles, Nanoparticles, Imaging systems, Diagnostics, Laser beam diagnostics, Chemical species, Clouds

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Proceedings Article | 19 November 1993 Paper

Picosecond signal recovery of type II tunneling bi-quantum-well etalon in all-optical gate operation

Atsushi Tackeuchi, Tsuguo Inata, Yoshiki Nakata, Satoshi Nakamura, Yoshihiro Sugiyama, Shunichi Muto

Proceedings Volume 1985, (1993) https://doi.org/10.1117/12.162795

KEYWORDS: Fabry–Perot interferometers, Picosecond phenomena, Gallium arsenide, Absorption, Electrons

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Showing 5 of 41 publications

Proceedings Volume Editor (4)

SPIE Conference Volume | 19 March 2015

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX

SPIE Conference Volume | 25 March 2014

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX

SPIE Conference Volume | 4 April 2013

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII

SPIE Conference Volume | 16 March 2012

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII

Conference Committee Involvement (19)

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXX

27 January 2025 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX

29 January 2024 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII

30 January 2023 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII

25 January 2022 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI

6 March 2021 | Online Only, California, United States

Laser-based Micro- and Nanoprocessing XIV

3 February 2020 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV

3 February 2020 | San Francisco, California, United States

Laser-based Micro- and Nanoprocessing XIII

5 February 2019 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV

4 February 2019 | San Francisco, California, United States

Laser-based Micro- and Nanoprocessing XII

30 January 2018 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII

29 January 2018 | San Francisco, California, United States

Laser-based Micro- and Nanoprocessing XI

31 January 2017 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII

30 January 2017 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI

15 February 2016 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX

9 February 2015 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX

3 February 2014 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII

4 February 2013 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII

23 January 2012 | San Francisco, California, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing XII

22 January 2007 | San Jose, California, United States

Showing 5 of 19 Conference Committees

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