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Yoshio Mizuta
at Univ of Hyogo
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Publications (1)
Proceedings Article | 21 March 2007 Paper
Development of optical component for EUV phase-shift microscopes
Yoshio Mizuta, Masafumi Osugi, Jyunki Kishimoto, Noriyuki Sakaya, Kazuhiro Hamamoto, Takeo Watanabe, Hiroo Kinoshita
Proceedings Volume 6517, 651733 (2007) https://doi.org/10.1117/12.711997
KEYWORDS: Beam splitters, Silicon, Multilayers, Argon, Molybdenum, Silicon films, Protactinium, Extreme ultraviolet, Reflectivity, Mirrors
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