Dr. Youichi Bitou
at National Metrology Institute of Japan
SPIE Involvement:
Publications (13)

Proceedings Article | 21 August 2020 Presentation + Paper
Proc. SPIE. 11492, Advances in Metrology for X-Ray and EUV Optics IX
KEYWORDS: Metrology, Interferometers, Calibration, Optical testing, Deflectometry, Autocollimators, 3D metrology, 3D scanning, Fizeau interferometers

Proceedings Article | 25 October 2016 Paper
Proc. SPIE. 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
KEYWORDS: Metrology, Silicon, Photography, Finite element methods, Measurement devices, Photomasks, Geometrical optics, Semiconducting wafers, Adhesives, Fizeau interferometers

Proceedings Article | 3 November 2011 Paper
Proc. SPIE. 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World
KEYWORDS: Wafer-level optics, Refractive index, Beam splitters, Silica, Interferometers, Glasses, Interferometry, Optical testing, Wavelength tuning, Phase measurement

Proceedings Article | 11 August 2008 Paper
Proc. SPIE. 7063, Interferometry XIV: Techniques and Analysis
KEYWORDS: Refractive index, Beam splitters, Ferroelectric materials, Interferometers, Glasses, Interferometry, Optical testing, Wavelength tuning, Phase measurement, Fizeau interferometers

Proceedings Article | 14 August 2006 Paper
Proc. SPIE. 6292, Interferometry XIII: Techniques and Analysis
KEYWORDS: Beam splitters, Ferroelectric materials, Silica, Interferometry, Phase interferometry, Profiling, Wavelength tuning, Phase measurement, Phase shifts, Fizeau interferometers

Showing 5 of 13 publications
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