Dr. Young-Sik Ghim Profile

Dr. Young-Sik Ghim

Principal Research Scientist at Korea Research Institute of Standards and Science

SPIE Involvement:

Author

Publications (13)

Proceedings Article | 20 May 2022 Presentation + Paper

Surface figure metrology based on geometric phase components

K.-N. Joo, H. M. Park, H. B. Jeong, C. Guthery, D. Kim, Y. S. Ghim

Proceedings Volume 12137, 121370C (2022) https://doi.org/10.1117/12.2624872

KEYWORDS: Polarization, Wavefronts, Shearing interferometers, Metrology, Aspheric lenses

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Proceedings Article | 21 June 2019 Paper

Spectrally-resolved white-light phase-shifted interferometry for 3D measurements of multilayer films

Young-Sik Ghim, Hyug-Gyo Rhee

Proceedings Volume 11056, 1105631 (2019) https://doi.org/10.1117/12.2527587

KEYWORDS: Multilayers, 3D metrology, Interferometry

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Proceedings Article | 16 October 2017 Paper

Dual-line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements

Young-Gwang Kim, Hyug-Gyo Rhee, Young-Sik Ghim, Ho-Soon Yang, Yun-Woo Lee

Proceedings Volume 10451, 104511R (2017) https://doi.org/10.1117/12.2280620

KEYWORDS: Lithography, Optics manufacturing, Optical components, Thermography, Manufacturing, Diffractive optical elements, Polonium, Laser ablation, Photomasks

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Proceedings Article | 16 October 2012 Paper

Ultra-precision surface polishing using ion beam figuring

Young-Sik Ghim, Shin-Jae You, Hyug-Gyo Rhee, Ho-Soon Yang, Yun-Woo Lee

Proceedings Volume 8416, 84161O (2012) https://doi.org/10.1117/12.973725

KEYWORDS: Ion beams, Surface finishing, Polishing, Ion beam finishing, Sputter deposition, Optical simulations, Surface roughness, Ions, Chemical species, Polyurethane

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Proceedings Article | 16 October 2012 Paper

Eight-axis-polishing machine for 2 m off-axis aspheric optics

Hyug-Gyo Rhee, Ho-Soon Yang, Il-Kweon Moon, Hagyong Kihm, Jae-Hyub Lee, Young-sik Ghim, Yun-Woo Lee

Proceedings Volume 8416, 84161K (2012) https://doi.org/10.1117/12.2009381

KEYWORDS: Polishing equipment, Interferometers, Aspheric optics, Calibration, Mirrors, Polishing, Optical fabrication, Heterodyning, Optical encoders, Finite element methods

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Proceedings Article | 13 September 2012 Paper

Self calibration for slope-dependent errors in optical profilometry by using the random ball test

Yue Zhou, Young-Sik Ghim, Angela Davies

Proceedings Volume 8493, 84930H (2012) https://doi.org/10.1117/12.928504

KEYWORDS: Calibration, Optical spheres, Confocal microscopy, Spherical lenses, Error analysis, Microscopes, Profilometers, Interferometers, Metrology, Interferometry

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Proceedings Article | 14 September 2011 Paper

Absolute thickness measurement of silicon wafer using wavelength scanning interferometer

Young-Sik Ghim, Amit Suratkar, Angela Davies, Yun-Woo Lee

Proceedings Volume 8133, 813312 (2011) https://doi.org/10.1117/12.898354

KEYWORDS: Semiconducting wafers, Interferometry, Silicon, Wafer-level optics, Charge-coupled devices, Reflectivity, Interferometers, Reflectometry, Refractive index, Error analysis

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Proceedings Article | 11 August 2008 Paper

Uncertainty analysis on the absolute thickness of a cavity using a commercial wavelength scanning interferometer

Amit Suratkar, Young-Sik Ghim, Angela Davies

Proceedings Volume 7063, 70630R (2008) https://doi.org/10.1117/12.793772

KEYWORDS: Fourier transforms, Calibration, Interferometers, Silica, Interferometry, Error analysis, Temperature metrology, Uncertainty analysis, Distance measurement, Refractive index

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Proceedings Article | 11 August 2008 Paper

Angle-resolved reflectometer for thickness measurement of multi-layered thin-film structures

Woo-Deok Joo, Joonho You, Young-Sik Ghim, Seung-Woo Kim

Proceedings Volume 7063, 70630Q (2008) https://doi.org/10.1117/12.797523

KEYWORDS: Thin films, Objectives, Reflectometry, Reflectivity, Metrology, Optical filters, Polarization, Interfaces, Light, Data modeling

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Proceedings Article | 14 September 2007 Paper

Simultaneous measurements of thin-film thickness and refractive index by dispersive white-light interferometry

Young-Sik Ghim, Joonho You, Seung-Woo Kim

Proceedings Volume 6674, 667402 (2007) https://doi.org/10.1117/12.732311

KEYWORDS: Thin films, Interferometry, Silicon, Refractive index, Mirrors, Optical filters, Chemical mechanical planarization, Inspection, Semiconductors, 3D displays

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Proceedings Article | 18 June 2007 Paper

Dispersive white light interferometry for 3D inspection of thin film layers of flat panel displays

Young-Sik Ghim, Joonho You, Seung-Woo Kim

Proceedings Volume 6616, 66160T (2007) https://doi.org/10.1117/12.726040

KEYWORDS: Thin films, Interferometry, Spectroscopy, Metrology, Inspection, Charge-coupled devices, 3D metrology, 3D acquisition, Data modeling, Phase measurement

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