Ms. YoungMi Kim Profile

YoungMi Kim

at ASML

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Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper

Machine learning techniques for OPC improvement at the sub-5 nm node

Changsoo Kim, Seungjong Lee, Sangwoo Park, No-Young Chung, Jungmin Kim, Narae Bang, Sanghwa Lee, SooRyong Lee, Robert Boone, Pengcheng Li, Jiyoon Chang, Xinxin Zhou, YoungMi Kim, MinSu Oh, Minsung Kim, Rachit Gupta, Jun Ye, Stanislas Baron

Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI

KEYWORDS: Lithography, Data modeling, Image processing, Neural networks, Extreme ultraviolet, Machine learning, Optical proximity correction, Photoresist processing, Statistical modeling, Performance modeling

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