Mr. Yu-Hsuan Liu Profile

Yu-Hsuan Liu

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Proceedings Article | 16 February 2017 Paper

Backside-incidence critically coupled Ge on SOI photodetector

Yu-Hsuan Liu, Tsung-Ting Wu, Szu-Lin Cheng, Han-Din Liu, Chun-Chi Lin, Hui-Wen Chen, Ming-Chang Lee, Neil Na

Proceedings Volume 10100, 101001X (2017) https://doi.org/10.1117/12.2251694

KEYWORDS: Photodetectors, Germanium, Receivers, Optical communications, Telecommunications, Quantum efficiency, Data communications, Optical instrument design, Silicon, Epitaxy, Mirrors, Aluminum, Metals, Scanning electron microscopy

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For present-day optical communication systems, the commonly used normal-incidence photodetectors suffer from the tradeoff between bandwidth and quantum efficiency. Such a tradeoff is especially adverse for long wavelength communication systems operating at higher data rates. For example, the maximum responsivity for a commercially available 25 Gbps photodetector operating at 1310 nm wavelength is limited to less than 0.8 A/W. In this work, we design and demonstrate a high-speed, backside-incidence, critically-coupled Ge on SOI photodetector operating at 1310 nm while maintaining a high quantum efficiency. Our device is fabricated with RPCVD epitaxy, i-line lithography, silicide contact, and Al metal wire, which are fully compatible with the state-of-art CMOS process technology. With our epitaxial scheme and surface passivation method, a low bulk (surface) dark current density of 13 mA/cm² (0.79 μA/cm) is measured from a ~ 700 nm thick Ge p-i-n device at -1 V bias. The responsivity at 1310 nm wavelength is measured to be 0.87 A/W, and the 3dB optical bandwidth of a 20 μm diameter device is measured to be 26 GHz. Our high-speed, backside-incidence, critically-coupled Ge on SOI photodetector may serve as a high-performance and low-cost solution for next generation high-speed optical receivers, and its benefit of decoupling bandwidth and quantum efficiency is especially prominent at higher data rates such as 40 Gbps and beyond.

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