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Yu Shiang Chang
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Publications (1)
Proceedings Article | 21 August 2014 Paper
A novel optical method for measuring the thin film stress
Yen-Chang Chu, Kun-Huang Chen, Jing-Heng Chen, Hua-Ken Tseng, Yu-Shiang Chang
Proceedings Volume 9233, 92331V (2014) https://doi.org/10.1117/12.2069833
KEYWORDS: Thin films, Heterodyning, Positron emission tomography, Interferometry, Image filtering, CCD cameras, CMOS cameras, Roads, Optical filters, Digital filtering
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