Yu-Tang Hu
at Macronix International Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 March 2021 Presentation + Paper
Proc. SPIE. 11614, Design-Process-Technology Co-optimization XV
KEYWORDS: Lithography, Process modeling, Photomasks, Lead, Etching

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: SRAF, Source mask optimization, Resolution enhancement technologies, Manufacturing, Lithography, 3D modeling, Printing, Photomasks, Molybdenum, Model-based design

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