Hf 4+ -doped and undoped (028)-oriented Bi4Ti 3O12 ferroelectric films with the same thickness have been deposited
on two SrRuO3 -covered (111)-oriented SrTiO3 substrates by pulsed laser deposition (PLD). The structures of the two
films were studied by x-ray diffraction (XRD). It was found that the Hf4+ ion doped at site B has greatly improved the
remnant polarization and fatigue property. That because the Hf4+ ion has changed the structure of Hf4+ -doped
Bi 4 Ti 3 O12 film a lot including a tensile strain along a axis, a triple-domain structure and distortion of oxygen
octahedral which result in an increase of the remnant polarization. And the triple-domain structure and the reduction of
oxygen vacancies also caused by Hf4+ ion doping improved the fatigue property.
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