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Yuan Pin Liao
at Synopsys Taiwan Co Ltd
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Publications (2)
Proceedings Article | 10 April 2024 Poster + Paper
Advanced regression OPC model setup
Tony Hu, Weilun Chiu, Terry Hsuan, Elvis Yang, Li-Jin Chen, Tony Chao, Y. Liao, Elsley Tan
Proceedings Volume 12954, 1295419 (2024) https://doi.org/10.1117/12.3008958
KEYWORDS: Autoregressive models, Optical proximity correction, Performance modeling, Education and training, 3D modeling, Calibration, Neurons, Data modeling, Modeling, Overfitting
Proceedings Article | 23 March 2020 Paper
EUV OPC methodology for beyond 20nm memory cell by simulation data
Jiunhau Fu, Chiang Lin Shih, Chun Cheng Liao, Eric Huang, Elsley Tan, John Tsai, Ming Yun Chen, Yuan Pin Liao, Seung Hee Baek
Proceedings Volume 11323, 113232H (2020) https://doi.org/10.1117/12.2551669
KEYWORDS: Optical proximity correction, Extreme ultraviolet, Molybdenum, Photomasks, Data modeling, Critical dimension metrology, Source mask optimization, Semiconducting wafers, EUV optics, Array processing
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