Dr. Yuan Xu
Senior Research Fellow at Institute of Materials Research and Engineering
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 29 July 2004 Paper
Kui Yao, Xujiang He, Yuan Xu, Meima Chen
Proceedings Volume 5389, (2004) https://doi.org/10.1117/12.539678
KEYWORDS: Ferroelectric materials, Ceramics, Silicon films, Dielectrics, Silicon, Oxides, Metals, Bismuth, Electrodes, Laser scanners

Proceedings Article | 14 November 2002 Paper
Yen-Peng Kong, Yuan Xu, Francis Tay
Proceedings Volume 4937, (2002) https://doi.org/10.1117/12.469086
KEYWORDS: Particles, Silicon, Semiconducting wafers, Microelectromechanical systems, Glasses, Photoresist materials, Liquids, Satellites, Etching, Oxides

Proceedings Article | 13 November 2002 Paper
Pei Ying Tan, Yuan Xu, Yong Chew, Zongli Li, Yen Kong
Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469435
KEYWORDS: Copper, Silicon, Electroplating, Skin, Microfabrication, Etching, Microelectromechanical systems, Oxides, Scanning electron microscopy, Chemical analysis

Proceedings Article | 28 September 2001 Paper
Yuan Xu, Yen-Peng Kong, Xuanxiong Zhang, Kui Yao, Wen Choong, Francis Tay, Wen Wang
Proceedings Volume 4560, (2001) https://doi.org/10.1117/12.443071
KEYWORDS: Ferroelectric materials, Silicon, Finite element methods, Glasses, 3D modeling, Actuators, Epoxies, Head, Semiconducting wafers, Modal analysis

Proceedings Article | 28 September 2001 Paper
Yuan Xu, Wen Choong, Francis Tay, Xuanxiong Zhang, Yen-Peng Kong, Haiqing Gong
Proceedings Volume 4560, (2001) https://doi.org/10.1117/12.443070
KEYWORDS: Ferroelectric materials, Finite element methods, Silicon, Glasses, Actuators, Microfluidics, Head, Quantitative analysis, 3D modeling, Data modeling

Showing 5 of 9 publications
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