Dr. Yuanqing Yang
at ASML
Area of Expertise:
Optics , Nanophotonics , Semiconductor , Photolithography , Metrology
Websites:
Publications (1)

Proceedings Article | 15 October 2015 Paper
Proceedings Volume 9673, 96730W (2015) https://doi.org/10.1117/12.2201115
KEYWORDS: Free space optics, Optical testing, Mineralogy, Surface plasmon polaritons, Gold, Plasmonics, Integrated optics, Nanostructures, Finite-difference time-domain method, Magnetism

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