Mr. Yueh-Lin Lee Profile

Yueh-Lin Lee

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Publications (4)

Proceedings Article | 18 March 2013 Paper

Effects of O2 plasma post-treatment on ZnO: Ga thin films grown by H2O-thermal ALD

Yueh-Lin Lee, Jia-Hao Chuang, Tzu-Hsuan Huang, Chong-Long Ho, Meng-Chyi Wu

Proceedings Volume 8626, 86261K (2013) https://doi.org/10.1117/12.2003029

KEYWORDS: Plasma, Oxygen, Gallium, Atomic layer deposition, Zinc oxide, Transmittance, Thin films, Sensors, Zinc, Thin film growth

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Proceedings Article | 4 February 2013 Paper

Investigation of temperature dependence on heterojunction bipolar light-emitting transistors embedded InGaAs/GaAs quantum wells

T. H. Huang, H. J. Chang, K. M. Huang, S. Y. Chiu, Y. L. Lee, W. J. Hong, C. L. Ho, M. C. Wu

Proceedings Volume 8631, 86312S (2013) https://doi.org/10.1117/12.2002750

KEYWORDS: Transistors, Quantum wells, Heterojunctions, Gallium arsenide, Modulation, Indium gallium arsenide, Temperature metrology, Wet etching, Etching, Oxides

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Proceedings Article | 21 November 2001 Paper

Smart dielectrics of fluorinated silicon glass prepared by liquid phase deposition method

Ching-Fa Yeh, Tien-Fu Chen, Yueh-Chuan Lee, Chien-Hung Liu, Shyue-Shyh Lin

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448980

KEYWORDS: Laser phosphor displays, Oxides, Reactive ion etching, Dielectrics, Silicon, Diodes, Field effect transistors, Fluorine, System on a chip, Glasses

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Proceedings Article | 23 September 1996 Paper

Selective SiO2-xFx growth with liquid-phase deposition for MEMS technology

Ching-Fa Yeh, Yueh-Chuan Lee, Jwinn-Lein Su

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251215

KEYWORDS: Photoresist materials, Silicon, Laser phosphor displays, Oxides, Microelectromechanical systems, Microfabrication, Semiconducting wafers, CMOS technology, Silica, Scanning electron microscopy

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