Dr. Yuichi Nishimae
at Ciba Specialty Chemicals KK
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 April 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Fluorine, Coating, Lithography, Chromophores, Polymers, Photoresist materials, Transparency, Chemically amplified resists, Carbon, Water

Proceedings Article | 2 April 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Polymers, Lithography, Line edge roughness, Photoresist materials, Coating, Scanning electron microscopy, Immersion lithography, Chemically amplified resists, Optical lithography, Absorption

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