KEYWORDS: Vibration isolation, Actuators, Optical isolators, Active vibration control, Control systems, Signal processing, Adaptive control, Digital filtering, Vibration control, Feedback control
This paper is concerned with a six-degree-of-freedom active vibration isolation system using voice coil actuators with absolute velocity feedback control for highly sensitive measurement equipment, e.g. atomic force microscopes, suffering from building vibration. The main differences between this type of system and traditional isolator, is that there are no isolator resonance. The absolute vibration velocity signal acquired from an accelerator and being processed through an integrator is input to the controller as a feedback signal, and the controller output signal drives the voice coil actuator to produce a sky-hook damper force. In practice, the phase response of integrator at low frequency such as 2~6 Hz deviate from the 90 degree which is the exact phase difference between the vibration velocity and acceleration. Therefore, an adaptive filter is used to compensate the phase error in this paper. An analysis of this active vibration isolation system is presented, and model predictions are compared to experimental results. The results show that the proposed method significantly reduces transmissibility at resonance without the penalty of increased transmissibility at higher frequencies.
This paper presents a three-degree-of-freedom hybrid vibration isolation system integrated with an active sky-hook damper and a passive weight support mechanism for highly sensitive measurement equipment, e.g. atomic force microscopes, suffering from building vibration. Active sky-hook damper applies proportional controller incorporated with an adaptive filter to reduce the resonance of the passive weight support mechanism at nature frequency. The absolute vibration velocity signal acquired from an accelerator and being processed through an integrator is input to the controller as a feedback signal, and the controller output signal drives the voice coil actuator to produce a sky-hook damper force. The adaptive filter is used to compensate the phase error between the measuring input signal and the absolute vibration velocity. An analysis of this active vibration isolation system is presented, and model predictions are compared to experimental results. The results show that the system could effectively reduce transmissibility at resonance without the penalty of increased transmissibility at higher frequencies both in vertical and horizontal directions.
An active vibration isolation system that applies proportional controller incorporated with an adaptive filter to reduce the transmission of base excitations to a precision instrument is proposed in this work. The absolute vibration velocity signal acquired from an accelerator and being processed through an integrator is input to the controller as a feedback signal, and the controller output signal drives the voice coil actuator to produce a sky-hook damper force. In practice, the phase response of integrator at low frequency such as 2~5 Hz deviate from the 90 degree which is the exact phase difference between the vibration velocity and acceleration. Therefore, an adaptive filter is used to compensate the phase error in this paper. An analysis of this active vibration isolation system is presented, and model predictions are compared to experimental results. The results show that the proposed method significantly reduces transmissibility at resonance without the penalty of increased transmissibility at higher frequencies.
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