Dr. Yun-Yao Lin Profile

Dr. Yun-Yao Lin

Manager at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (6)

Proceedings Article | 21 November 2023 Presentation + Paper

EUV pellicle technology for high volume wafer production

Yun-Yao Lin, Pei-Hsun Tsai, Kelvin Elphick, Ching-Ho Hsu, Dino K. Shieh, Feng Hao Chang, James C. Huang, Jerry C. Chen, Vincent C. Wen

Proceedings Volume 12750, 127500N (2023) https://doi.org/10.1117/12.2688127

KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Reticles, Scanners, Inspection, High volume manufacturing, Transmittance, Contamination

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Proceedings Article | 9 September 2013 Paper

Implementable and systematic mitigation of native defects in EUV masks

Wen-Chang Hsueh, Li-Chih Yeh, Ming-Jiun Yao, Yun-Yue Lin, Jia-Jen Chen, Shin-Chang Lee, Anthony Yen

Proceedings Volume 8880, 88800Y (2013) https://doi.org/10.1117/12.2025786

KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Scanning electron microscopy, Semiconducting wafers, Extreme ultraviolet lithography, Atomic force microscopy, Fermium, Lithography, Frequency modulation

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Proceedings Article | 30 June 2012 Paper

Interplay of three-dimensional profile change and CD variation in 193-nm advanced binary photomasks

Yun-Yue Lin, Sean Su, Wen-Chang Hsush, Ta-Cheng Lien, Jia-Jen Chen, Shin-Chang Lee, Anthony Yen

Proceedings Volume 8441, 844102 (2012) https://doi.org/10.1117/12.964411

KEYWORDS: Photomasks, Critical dimension metrology, Etching, Molybdenum, Binary data, 3D metrology, Atomic force microscopy, Optical lithography, Chemical analysis, Metrology

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Proceedings Article | 3 September 2008 Paper

Improved performance of polymer/TiO2 nanorods bulk heterojunction photovoltaic devices by interface modification

Yun-Yue Lin, S. Lee, Tsung-Hung Chu, Wei-Fang Su, Chun-Wei Chen

Proceedings Volume 7052, 70520S (2008) https://doi.org/10.1117/12.792071

KEYWORDS: Polymers, Photovoltaics, Interfaces, Solar cells, Molecules, Heterojunctions, Absorption, Nanocrystals, Nanorods, Titanium dioxide

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Proceedings Article | 14 November 2007 Paper

Charge separation and transport in ZnO nanostructures/polymer:TiO2 hybrid solar cell

Yun-Yue Lin, Tsung Hung Chu, Chun-Wei Chen, Wei-Fang Su, Chih-Cheng Lin, Chen-Hao Ku, Jih-Jen Wu, Cheng-Hsuan Chen

Proceedings Volume 6656, 66560B (2007) https://doi.org/10.1117/12.733378

KEYWORDS: Zinc oxide, Polymers, Photovoltaics, Solar cells, Nanostructuring, Electrodes, Thin films, Excitons, Interfaces, Nanorods

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Proceedings Article | 3 November 2006 Paper

Exciton dissociation and migration in enhanced-order conjugated polymer/nanoparticle hybrid materials

Yun-Yue Lin, I. Liu, Chun-Wei Chen, Wei-Fang Su

Proceedings Volume 6334, 63340Q (2006) https://doi.org/10.1117/12.678776

KEYWORDS: Nanoparticles, Polymers, Composites, Excitons, Luminescence, Spectroscopy, Time resolved spectroscopy, Absorption, Interfaces, Transmission electron microscopy

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Showing 5 of 6 publications

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