Dr. Yun Yue Lin
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Publications (5)

Proceedings Article | 9 September 2013 Paper
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Lithography, Inspection, Atomic force microscopy, Scanning electron microscopy, Frequency modulation, Photomasks, Extreme ultraviolet, Fermium, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 30 June 2012 Paper
Proc. SPIE. 8441, Photomask and Next-Generation Lithography Mask Technology XIX
KEYWORDS: Metrology, Optical lithography, Etching, Atomic force microscopy, 3D metrology, Photomasks, Chemical analysis, Critical dimension metrology, Molybdenum, Binary data

Proceedings Article | 3 September 2008 Paper
Proc. SPIE. 7052, Organic Photovoltaics IX
KEYWORDS: Photovoltaics, Titanium dioxide, Polymers, Solar cells, Molecules, Interfaces, Nanocrystals, Heterojunctions, Absorption, Nanorods

Proceedings Article | 14 November 2007 Paper
Proc. SPIE. 6656, Organic Photovoltaics VIII
KEYWORDS: Thin films, Photovoltaics, Nanostructuring, Electrodes, Polymers, Solar cells, Interfaces, Excitons, Zinc oxide, Nanorods

Proceedings Article | 3 November 2006 Paper
Proc. SPIE. 6334, Organic Photovoltaics VII
KEYWORDS: Nanoparticles, Polymers, Spectroscopy, Luminescence, Composites, Interfaces, Transmission electron microscopy, Excitons, Time resolved spectroscopy, Absorption

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