Ms. Yun Tang Profile

Yun Tang

at GLOBALFOUNDRIES Singapore

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Publications (2)

Proceedings Article | 12 April 2013 Paper

3D resist profile full chip verification and hot spot disposition

Qing Yang, ShyueFong Quek, YeeMei Foong, Jens Hassmann, DongQing Zhang, Andre Leschok, Tang Yun, Mu Feng, Stanislas Baron, JianHong Qiu, Taksh Pandey, Bo Yan, Russell Dover

Proceedings Volume 8683, 86831N (2013) https://doi.org/10.1117/12.2010595

KEYWORDS: 3D modeling, Optical proximity correction, Etching, Photoresist processing, Semiconducting wafers, Metals, 3D image processing, Scanning electron microscopy, Computer simulations, Lithography

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Proceedings Article | 13 March 2012 Paper

Source mask optimization methodology (SMO) and application to real full chip optical proximity correction

DongQing Zhang, GekSoon Chua, YeeMei Foong, Yi Zou, Stephen Hsu, Stanislas Baron, Mu Feng, Hua-Yu Liu, Zhipan Li, Jessy Schramm, T. Yun, Carl Babcock, Byoung IL Choi, Stefan Roling, Alessandra Navarra, Tanja Fischer, Andre Leschok, Xiaofeng Liu, Weijie Shi, Jianhong Qiu, Russell Dover

Proceedings Volume 8326, 83261V (2012) https://doi.org/10.1117/12.916614

KEYWORDS: Source mask optimization, Optical proximity correction, Semiconducting wafers, Lithography, Electroluminescence, Scanning electron microscopy, Finite element methods, Etching, Critical dimension metrology, Image processing

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