Mr. Yung-Sung Yen Profile

Yung-Sung Yen

at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (2)

Proceedings Article | 19 March 2008 Paper

Layout patterning check for DFM

C. C. Chang, I. C. Shih, J. F. Lin, Y. S. Yen, C. M. Lai, W. C. Huang, R. G. Liu, Y. C. Ku

Proceedings Volume 6925, 69251R (2008) https://doi.org/10.1117/12.775420

KEYWORDS: Lithography, Design for manufacturing, Nanoimprint lithography, Optical lithography, Manufacturing, Design for manufacturability, Critical dimension metrology, Model-based design, Semiconducting wafers, Inspection

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Proceedings Article | 17 December 2003 Paper

Global CD uniformity improvement in mask manufacturing for advanced lithography

Shih-Ming Chang, Chih-Cheng Chin, Wen-Chuan Wang, Chi-Lun Lu, Ren-Guey Hsieh, Cherng-Shyan Tsay, Yung-Sung Yen, Sheng-Chi Chin, Hsin-Chang Lee, Ru-Gun Liu, Kuei-Shun Chen, Hung-Chang Hsieh, Yao Ku, John Lin

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518008

KEYWORDS: Photomasks, Error analysis, Critical dimension metrology, Lithography, Manufacturing, Inspection, Etching, Software development, Semiconductor manufacturing, Control systems

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