Mr. Yusuke Ikeda Profile

Yusuke Ikeda

at Univ of Shiga Prefecture

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Proceedings Article | 15 November 2019 Paper

Silicone grating fabricated using photoresist mold

Itsunari Yamada, Yusuke Ikeda

Proceedings Volume 11175, 111751Y (2019) https://doi.org/10.1117/12.2535713

KEYWORDS: Diffraction gratings, Silicon, Photoresist materials, Diffraction, Optical components, Distortion

Read Abstract +

We fabricated a transmission silicone grating using two-beam interference method and imprint lithography, and evaluated its optical characteristics during a compression process. The grating pattern with ~0.4 μm depth and 1 μm pitch was created on a silicone surface by imprinting process with a photoresist mold to realize a simple, low-cost fabrication process. The first order diffraction transmittance of this grating reached ~10% at 633 nm wavelength. We also measured the relationship between the grating period and compressive stress to the fabricated elements. The grating period changed from 1 μm to ~0.8 μm by ~17% compression of the fabricated element in one direction, perpendicular to the grooves.

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