Dr. Yves Pétremand
at Ctr Suisse d'Electronique et de Microtechnique SA
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Mirrors, Spectrographs, Electrodes, Spectroscopy, Clouds, Microopto electromechanical systems, Micromirrors, Semiconducting wafers, Wafer bonding

Proceedings Article | 20 February 2017 Presentation + Paper
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Mirrors, Laser therapeutics, Etching, Scanners, Silicon, Endoscopes, Deep reactive ion etching, Wafer bonding

Proceedings Article | 20 February 2017 Paper
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Oxides, Mirrors, Waveguides, Sensors, Etching, Silicon, Temperature sensors, Microopto electromechanical systems, Electromagnetism

Proceedings Article | 13 March 2013 Paper
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Packaging, Mirrors, Silica, Electrodes, Silicon, Signal processing, Micromirrors, Medium wave, Semiconducting wafers, Wafer bonding

Proceedings Article | 9 March 2013 Paper
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Light sources, Electrodes, Dielectrics, Reliability, Lamps, Atomic clocks, Microfabrication, Optical pumping, Rubidium, Plasma

Showing 5 of 9 publications
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