Unspecified Zecheng Liu Profile

Zecheng Liu

at ASM Japan KK

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Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper

Evaluation of TiN hardmask films to prevent line wiggling due to plasma-induced film stress

A. Turnquist, N. Kofuji, J. Sebastian, Z. Liu, H. Kou, H. Fukuda, Y. Tomczak, Y. Sun, D. Piumi, D. Roest

Proceedings Volume 12499, 1249904 (2023) https://doi.org/10.1117/12.2661307

KEYWORDS: Tin, Coating stress, Etching, Plasma, Plasma etching, Surface roughness, Scanning electron microscopy, Film thickness, Line edge roughness, Deformation

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Proceedings Article | 1 May 2023 Presentation + Paper

Scaled-down deposited underlayers for EUV lithography

Mihir Gupta, Joao Antunes Afonso, Philippe Bezard, Remi Vallat, Roberto Fallica, Hyo Seon Suh, Sandip Halder, Danilo De Simone, Zecheng Liu, Fanyong Ran, Hideaki Fukuda, Yiting Sun, David De Roest, Daniele Piumi

Proceedings Volume 12498, 124980R (2023) https://doi.org/10.1117/12.2660376

KEYWORDS: Film thickness, Extreme ultraviolet lithography, Etching, Adhesion, Line width roughness, Line edge roughness, Surface roughness, Lithography, Interfaces

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