Zhaotao Liu
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 August 2004 Paper
Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.545254
KEYWORDS: Speckle pattern, Interferometry, Speckle, Speckle interferometry, Microelectromechanical systems, Aluminum, Scanning electron microscopy, Data processing, Liquids, Mechanics

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