Dr. Zheng Cui
Senior Scientist at Science and Technology Facilities Council
SPIE Involvement:
Author
Publications (38)

Proceedings Article | 28 November 2007 Paper
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Electron beam lithography, Etching, Silicon, Photomasks, Deep reactive ion etching, Reactive ion etching, Photoresist processing, Nanolithography, Standards development, Chemically amplified resists

SPIE Journal Paper | 1 January 2006
JM3 Vol. 5 Issue 01
KEYWORDS: Nanoimprint lithography, Silicon, Gallium arsenide, Polymethylmethacrylate, Lithography, Etching, Electron beam lithography, Scanning electron microscopy, Distortion, Dry etching

Proceedings Article | 28 September 2005 Paper
Proc. SPIE. 5955, Metamaterials
KEYWORDS: Metamaterials, Lithography, Electron beam lithography, Etching, Dielectrics, Silicon, Manufacturing, Nanoimprint lithography, Optics manufacturing, Dielectric polarization

Proceedings Article | 30 December 2004 Paper
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Microelectromechanical systems, Microsystems, Etching, Polymers, Metals, Silicon, Manufacturing, Microopto electromechanical systems, Micromachining, Microfabrication

Proceedings Article | 25 March 2003 Paper
Proc. SPIE. 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly
KEYWORDS: Optical components, Chromatic aberrations, Lithography, Optical design, Microlens array, Photoresist materials, Microlens, Photomasks, OSLO, Photoresist developing

Showing 5 of 38 publications
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