Mr. Zhengchun Peng Profile

Zhengchun Peng

at Georgia Institute of Technology

SPIE Involvement:

Author

Publications (3)

SPIE Journal Paper | 1 July 2010

Wafer-scale process for fabricating arrays of nanopore devices

Amir Ahmadi, Zhengchun Peng, Peter Hesketh, Sankar Nair

JM3, Vol. 9, Issue 03, 033011, (July 2010) https://doi.org/10.1117/12.10.1117/1.3486202

KEYWORDS: Semiconducting wafers, Silicon, Array processing, Atomic layer deposition, Nanolithography, Scanning electron microscopy, Electron beam lithography, Solid state electronics, Silicon films, Etching

Read Abstract +

Proceedings Article | 22 January 2005 Paper

Interconnected multilevel microfluidic channels fabricated using low-temperature bonding of SU-8 and multilayer lithography

Zheng-Chun Peng, Zhong-Geng Ling, Jost Goettert, Josef Hormes, Kun Lian

Proceedings Volume 5718, (2005) https://doi.org/10.1117/12.592244

KEYWORDS: Microfluidics, Lithography, Semiconducting wafers, Photomasks, Silicon, Neodymium, Polymers, Liquids, Ultraviolet radiation, Wafer bonding

Read Abstract +

Proceedings Article | 15 January 2003 Paper

Borosilicate-glass-based x-ray masks for LIGA microfabrication

Yohannes Desta, Martin Bednarzik, Michael Bryant, Jost Goettert, Linke Jian, Yoonyoung Jin, Daejong Kim, Sanghoon Lee, Bernd Loechel, Hans-Ulrich Scheunemann, Zhengchun Peng

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478258

KEYWORDS: Photomasks, X-rays, Glasses, Gold, Polymethylmethacrylate, Borosilicate glass, X-ray lithography, Surface roughness, Lithography, Electroplating

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years