Zhengchun Peng
at Georgia Institute of Technology
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 1 July 2010
JM3 Vol. 9 Issue 03
KEYWORDS: Semiconducting wafers, Silicon, Array processing, Atomic layer deposition, Nanolithography, Scanning electron microscopy, Electron beam lithography, Solid state electronics, Silicon films, Etching

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5718, Microfluidics, BioMEMS, and Medical Microsystems III
KEYWORDS: Microfluidics, Lithography, Semiconducting wafers, Photomasks, Silicon, Neodymium, Polymers, Liquids, Ultraviolet radiation, Wafer bonding

Proceedings Article | 15 January 2003 Paper
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Photomasks, X-rays, Glasses, Gold, Polymethylmethacrylate, Borosilicate glass, X-ray lithography, Surface roughness, Lithography, Electroplating

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