Dr. Zhengkun Liu Profile

Dr. Zhengkun Liu

at Univ of Science and Technology of China

SPIE Involvement:

Author

Publications (15)

Proceedings Article | 24 November 2021 Paper

Design of high-density concave variable line space grating based on Lyman ultraviolet

Tao Ren, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Xiangdong Xu, Yanan Wang, Zhiwen Chen

Proceedings Volume 12069, 1206912 (2021) https://doi.org/10.1117/12.2606765

KEYWORDS: Diffraction gratings, Spectroscopy, Optical design, Holography, Ultraviolet radiation, Error analysis, Diffraction, Holographic interferometry, Polarization, Beam splitters

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Proceedings Article | 24 November 2021 Paper

Fabrication of UV transmission blazed gratings by holography-ion beam etching

Zhiwen Chen, Yanan Wang, Maoqi Cai, Ruizhi Li, Tao Ren, Keqiang Qiu, Zhengkun Liu, Huoyao Chen, Yilin Hong

Proceedings Volume 12069, 1206911 (2021) https://doi.org/10.1117/12.2606759

KEYWORDS: Etching, Ion beams, Diffraction gratings, Ultraviolet radiation, Holography, Photomasks, Diffraction, Silica, Quartz, Motion models

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Proceedings Article | 24 November 2021 Paper

High-efficiency visible and near-infrared transmission gratings in fused silica for astronomical ground-based telescope spectrographs

Yanan Wang, Zhiwen Chen, Ruizhi Li, Tao Ren, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Ying Liu

Proceedings Volume 12069, 1206904 (2021) https://doi.org/10.1117/12.2601658

KEYWORDS: Diffraction gratings, Diffraction, Etching, Reactive ion etching, Telescopes, Spectrographs, Silica, Ion beams, Binary data, Holography

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Proceedings Article | 31 January 2020 Paper

High line density fused silica transmission gratings by deep reactive ion beam etching for ultra-short pulse laser compression

Yanan Wang, Zhiwen Chen, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Xiangdong Xu

Proceedings Volume 11427, 114271U (2020) https://doi.org/10.1117/12.2551974

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Proceedings Article | 31 October 2016 Paper

Anti-reflective sub-wavelength structures at a wavelength of 441.6 nm for phase masks of near-field lithography

Jinyu Li, Huoyao Chen, Stefanie Kroker, Thomas Käsebier, Zhengkun Liu, Keqiang Qiu, Ying Liu, Ernst-Bernhard Kley, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 10022, 100220T (2016) https://doi.org/10.1117/12.2246381

KEYWORDS: Electron beam lithography, Antireflective coatings, Lithography, Near field, Photomasks, Interfaces, Reflectivity, Glasses, Diffraction, Stray light

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Proceedings Article | 31 October 2016 Paper

Design of soft x-ray varied-line-spacing grating based on electron beam lithography-near field lithography

Dakui Lin, Huoyao Chen, Stefanie Kroker, Thomas Käsebier, Zhengkun Liu, Keqiang Qiu, Ying Liu, Ernst-Bernhard Kley, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 10022, 100220S (2016) https://doi.org/10.1117/12.2246356

KEYWORDS: Lithography, X-rays, Silica, Photomasks, X-ray lithography, Electron beam lithography, Optical design, Electron beams, Photoresist materials, Diffraction

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Proceedings Article | 28 October 2016 Paper

Method for ion beam etching in angles with multi-layers model

Siwei Zeng, Lixiang Wu, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 9683, 96830L (2016) https://doi.org/10.1117/12.2242280

KEYWORDS: Etching, Ion beams, Photoresist materials, Diffraction gratings, Monte Carlo methods, Sputter deposition, Lithium, Quartz, Ions, Chemical species

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Proceedings Article | 24 October 2016 Paper

Fabrication of large-aperture, high efficiency, Fresnel diffractive membrane optic for space telescope

Jian Zhang, Mengjuan Li, Ganghua Yin, Jianchao Jiao, Zhengkun Liu, Xiangdong Xu, Shaojun Fu

Proceedings Volume 9682, 96820O (2016) https://doi.org/10.1117/12.2242266

KEYWORDS: Space telescopes, Diffraction, Silica, Liquids, Etching, Wavefronts, Polymers, Fresnel lenses, Reflectivity, Remote sensing

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SPIE Journal Paper | 12 October 2016

Optical position sensor based on a digital wavelength-encoding grating ruler

Yu Wang, Huoyao Chen, Zhengkun Liu, Yilin Hong

OE, Vol. 55, Issue 10, 107103, (October 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.10.107103

KEYWORDS: Sensors, Position sensors, Diffraction gratings, Computer programming, Demodulation, Optical sensors, Optical fibers, Signal detection, Optical engineering, Signal processing

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Proceedings Article | 30 August 2013 Paper

Improving the spectral resolution of soft x-ray flat-field spectrometer with multi-area gratings

Huoyao Chen, Zhengkun Liu, Qingbo Wang, Shaojun Fu

Proceedings Volume 8910, 89102A (2013) https://doi.org/10.1117/12.2035205

KEYWORDS: Spectral resolution, Diffraction gratings, Spectroscopy, Diffraction, X-rays, Image quality, Ray tracing, Optical design, Charge-coupled devices, X-ray technology

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Proceedings Article | 30 August 2013 Paper

Optimum design of a holographic parallel flat-field grating

Qing-bo Wang, Zheng-kun Liu, Huo-yao Chen, Shao-jun Fu

Proceedings Volume 8910, 89101X (2013) https://doi.org/10.1117/12.2034933

KEYWORDS: Spectral resolution, Holography, Optical design, Sensors, Spectrometers, Monochromatic aberrations, Tolerancing, Charge-coupled devices, Aberration theory, Image analysis

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Proceedings Article | 15 October 2012 Paper

Fabrication of a new type of transmission grating with holography interferometry and wet anisotropic etching

Yong Chen, Keqiang Qiu, Xiangdong Xu, Yilin Hong, Zhenkun Liu, Ying Liu, Shaojun Fu

Proceedings Volume 8418, 84180O (2012) https://doi.org/10.1117/12.971424

KEYWORDS: Diffraction gratings, Photomasks, Silicon, Holography, Etching, Diffraction, Wet etching, Lithography, Optical alignment, Interferometry

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Proceedings Article | 12 January 2012 Paper

Mechanical polishing to improve uniformity of beam sampling grating and its effects on laser-induced damage

Huanle Rao, Zhengkun Liu, Ying Liu, Shaojun Fu

Proceedings Volume 8206, 820613 (2012) https://doi.org/10.1117/12.910341

KEYWORDS: Polishing, Diffraction, Diffraction gratings, Laser induced damage, Mechanical efficiency, Laser damage threshold, Holography, Laser energy, Ion beams, Surface finishing

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Proceedings Article | 21 November 2007 Paper

Optimizing the varied line-space grating with the curvature of grating substrate

Zhengkun Liu, Bin Liu, Xiangdong Xu, Ying Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 6724, 67241I (2007) https://doi.org/10.1117/12.782893

KEYWORDS: Holography, Spherical lenses, Fabrication, Mirrors, Lithography, Photoresist materials, Optics manufacturing, Wavefronts, Synchrotron radiation, Time metrology

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Proceedings Article | 19 November 2007 Paper

Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer

Xin Tan, Ying Liu, Zheng-kun Liu, Shao-jun Fu

Proceedings Volume 6724, 67240J (2007) https://doi.org/10.1117/12.782518

KEYWORDS: Diffraction gratings, Interferometers, Sensors, X-ray lasers, Measurement devices, Diffraction, Semiconductor lasers, Collimation, Charge-coupled devices, CCD image sensors

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Showing 5 of 15 publications

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