Dr. Zhi Li
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Publications (13)

Proceedings Article | 26 June 2017 Paper
Proc. SPIE. 10329, Optical Measurement Systems for Industrial Inspection X
KEYWORDS: Mirrors, Beam splitters, Digital signal processing, Modulation, Interferometers, Calibration, Interferometry, Data acquisition, Signal processing, Laser interferometry, Homodyne detection, Sensor calibration, Nanolithography

Proceedings Article | 7 June 2017 Paper
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Microelectromechanical systems, Actuators, Microscopes, Metrology, Graphene, Calibration, Microscopy, Silicon, Atomic force microscopy, Head, Transducers, Sensing systems, Atomic force microscope, Scanning probe microscopy, Microfabrication, Prototyping

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Metrology, Sensors, Calibration, Silicon, Atomic force microscopy, Bridges, Sensor calibration, Standards development, Microtechnology

Proceedings Article | 1 May 2014 Paper
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Microelectromechanical systems, Thin films, Interferometers, Sensors, Calibration, Glasses, Silicon, Transducers, Sapphire, Microfabrication

Proceedings Article | 14 May 2010 Paper
Proc. SPIE. 7718, Optical Micro- and Nanometrology III
KEYWORDS: Microelectromechanical systems, Actuators, Metrology, Interferometers, Calibration, Atomic force microscopy, Head, Sensing systems, Scanning probe microscopy, Scanning probe microscopes

Showing 5 of 13 publications
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