Dr. Zhih-Yu Pan Profile

Dr. Zhih-Yu Pan

at Taiwan Semiconductor Mfg Co

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 17 March 2008 Paper

Influence of shot noise on CDU with DUV, EUV, and E-beam

Zhih-Yu Pan, Chun-Kuang Chen, Tsai-Sheng Gau, Burn Lin

Proceedings Volume 6924, 69241K (2008) https://doi.org/10.1117/12.776776

KEYWORDS: Extreme ultraviolet, Critical dimension metrology, Electron beam lithography, Deep ultraviolet, Lithography, Extreme ultraviolet lithography, Raster graphics, Quantum physics, Photons, Semiconducting wafers

Read Abstract +

Proceedings Article | 6 December 2004 Paper

Phase-defocus windows for alternating phase shifting mask

Fu-Jye Liang, Chun-Kuang Chen, Jaw-Jung Shin, Jan-Wen You, Chun-Heng Lin, Zhin-Yu Pan, King-Chang Shu, Tsai-Sheng Gau, Burn Lin

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.569216

KEYWORDS: Photomasks, Semiconducting wafers, Phase shifting, Phase shifts, Photomask technology, Optical lithography, Quartz, Etching, Mask making

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years