Zhijian Zhong
at Institute of Microelectronics of the Cas
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Computer programming, Calibration, Digital imaging, Optical sensors, Cameras, Wavelet transforms, Optical encoders, Fringe analysis, CMOS sensors, Fourier transforms

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