Dr. Zhijun Zhang
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 4 January 2008 Paper
Proc. SPIE. 6831, Nanophotonics, Nanostructure, and Nanometrology II
KEYWORDS: Magnetism, Iron, Lithography, Nanostructures, Nanolithography, Oxygen, Cobalt, Tantalum, Gold, Etching

Proceedings Article | 21 November 2007 Paper
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Ultraviolet radiation, Polymethylmethacrylate, Semiconducting wafers, Transmittance, Scanning electron microscopy, Glasses, Wafer bonding, Nanolithography, Polymers, Silicon

Proceedings Article | 21 November 2007 Paper
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Magnetism, Lithography, Iron, Etching, Cobalt, Ion beams, Photoresist materials, X-ray magnetic circular dichroism, Tantalum, Sputter deposition

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