Dr. Zhimin Zhu
Sr Scientist at Brewer Science Inc
SPIE Involvement:
Publications (15)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Photoresist materials, Interfaces, Lithography, Silicon, Semiconducting wafers, Computer simulations, Multilayers, Surface properties

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Algorithm development, Semiconducting wafers, Polymer thin films, Polymers, Software development, Optics manufacturing, Scattering, Thin films, Lithography, Coating

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Thin films, Polymers, Optical lithography, Polymer thin films, Lithography, Stochastic processes, Absorption, Reflectivity, Etching, Interfaces

Proceedings Article | 20 March 2018 Presentation
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Stochastic processes, Lithography, Line edge roughness, Optical lithography, Optical imaging, Diffusion, Photoresist processing, Materials processing

Proceedings Article | 3 May 2017 Presentation
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Optical lithography, Current controlled current source, Computed tomography, Reflectivity, Lithography

Showing 5 of 15 publications
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