Dr. Zhiqiang Fan Profile

Dr. Zhiqiang Fan

at Brewer Science Inc

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Publications (3)

Proceedings Article | 25 May 2022 Paper

Suppressing stochastic interaction to improve EUV lithography

Zhimin Zhu, Joyce Lowes, Shawn Ye, Zhiqiang Fan, Tim Limmer

Proceedings Volume 12055, 120550P (2022) https://doi.org/10.1117/12.2614289

KEYWORDS: Stochastic processes, System on a chip, Lithography, Extreme ultraviolet lithography, Diffusion, Optical lithography, Extreme ultraviolet, Photoresist processing, Printing, Optical imaging

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Proceedings Article | 23 March 2020 Presentation + Paper

Are surfaces of silicon hardmasks adaptive?

Xianggui (Shawn) Ye, Joyce Lowes, Zhimin Zhu, Richard Daugherty, Zhiqiang Fan, James Lamb, Tim Limmer, Srikanth Kommu

Proceedings Volume 11326, 1132616 (2020) https://doi.org/10.1117/12.2552929

KEYWORDS: Photoresist materials, Interfaces, Lithography, Silicon, Semiconducting wafers, Computer simulations, Multilayers, Surface properties

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Proceedings Article | 23 March 2020 Presentation + Paper

Rigorous vase data fitting for ultrathin films

Zhimin Zhu, Joyce Lowes, Shawn Ye, Zhiqiang Fan, Darin Collins, James Lamb, Tim Limmer

Proceedings Volume 11327, 113270J (2020) https://doi.org/10.1117/12.2551934

KEYWORDS: Algorithm development, Semiconducting wafers, Polymer thin films, Polymers, Software development, Optics manufacturing, Scattering, Thin films, Lithography, Coating

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