Dr. Zhiwei Li
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 5 November 2020 Paper
Zhiwei Li, Junming Shao, Qian Luo, Bin Fan, Baiping Lei, Guohan Gao, Jiang Bian, Shibin Wu, Junfeng Du
Proceedings Volume 11568, 115680Z (2020) https://doi.org/10.1117/12.2579498
KEYWORDS: Photomasks, Photoresist materials, Ions, Surface roughness, Reactive ion etching, Phase measurement, Optical lithography, Optical fabrication

Proceedings Article | 30 January 2019 Paper
Proceedings Volume 10841, 108410G (2019) https://doi.org/10.1117/12.2512222
KEYWORDS: Reactive ion etching, Electrodes, Etching, 3D modeling, Plasma, Electronics, Plasma etching, Manufacturing, Protactinium, Lithium

Proceedings Article | 21 August 2014 Paper
Proceedings Volume 9283, 92830R (2014) https://doi.org/10.1117/12.2068526
KEYWORDS: Polymers, Refractive index, Fabrication, Lithography, Remote sensing, Reflectivity, Waveguides, Diffraction gratings, Silicon, Photorefractive polymers

Proceedings Article | 31 January 2013 Paper
Proceedings Volume 8759, 875926 (2013) https://doi.org/10.1117/12.2014583
KEYWORDS: Optical components, Polymers, Microlens array, Epoxies, Optical properties, Quartz, Polymerization, Optical fabrication equipment, Germanium, Chemical elements

Proceedings Article | 31 January 2013 Paper
Proceedings Volume 8759, 87593I (2013) https://doi.org/10.1117/12.2014892
KEYWORDS: Polarizers, Metals, Infrared radiation, Gold, Refractive index, Transmittance, Finite-difference time-domain method, Polarization, Aluminum, Chromium

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