Zhong-Geng Ling
at Louisiana State Univ
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6112, Microfluidics, BioMEMS, and Medical Microsystems IV
KEYWORDS: Microfluidics, Polymethylmethacrylate, Silicon, Diffusion, Coating, Manufacturing, Resistance, Biosensors, Photoresist materials, Liquids

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5718, Microfluidics, BioMEMS, and Medical Microsystems III
KEYWORDS: Lithography, Microfluidics, Polymers, Ultraviolet radiation, Silicon, Photomasks, Neodymium, Semiconducting wafers, Wafer bonding, Liquids

Proceedings Article | 30 December 2003 Paper
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Gold, Lithography, Ultraviolet radiation, X-rays, Photoresist materials, Photomasks, Plating, Beryllium, Photoresist processing, X-ray lithography

Proceedings Article | 16 January 2003 Paper
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Polishing, Annealing, Nickel, Scanning electron microscopy, Transmission electron microscopy, Plating, Mechanical engineering, Photomicroscopy, Temperature metrology

Proceedings Article | 16 January 2003 Paper
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Lithography, Ultraviolet radiation, Particles, Photoresist materials, Microopto electromechanical systems, Thermal analysis, Polymerization, Epoxies, Temperature metrology

Showing 5 of 13 publications
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