SOI (silicon-on-insulator)-based micro-resonator is the key building block of silicon photonics, which is considered as a
promising solution to alleviate the bandwidth bottleneck of on-chip interconnects. Silicon-based sub-micron waveguide,
microring and microdisk devices are investigated in Institute of Semiconductors, Chinese Academy of Sciences. The
main progress in recent years is presented in this talk, such as high Q factor single mode microdisk filters, compact thirdorder
microring filters with the through/drop port extinctions to be ~ 30/40 dB, fast microring electro-optical switches
with the switch time of < 400 ps and crosstalk < -23 dB, and > 10 Gbit/s high speed microring modulators.
SOI promises a good platform for dense integration of optical devices. However, as dimensions scale down, propagation
losses mainly caused by the scattering loss at sidewall had been serious problems. ICP etching of SOI is proved to be an
available anisotropic etch technique to make submicron optical waveguide devices. With the help of e-beam lithography,
We fabricated Single-mode submicron rib SOI waveguide with propagation loss as low as 1.2 dB/mm. Examples of SOI
optical waveguide devices are also presented, such as sharp bends and ring resonators with a quality factor larger than
A new microwave sensor in which active and passive mode sensors are working synergistically is designed for future China space projects. In the system the scatterometry, altimetry and radiometry functions are integrated technically. There are three operation modes and the mode combination can be selected in order of user requirement. The main modes are: ALT + RAD1, SCAT + RAD1, Multifrequency RAD, working at five frequency band (RAD2 - RAD6). Altimeter, Scatterometer and Radiometer RAD1, working at same ku band frequency and use a common antenna. The system design is based at operational airborne sensors which was in operation from early 1980. Main key problem of the system is solving during the design of this system is the mode combination technique, antenna technology, data management and system calibration.