Prof. Zhongyuan Ma Profile

Prof. Zhongyuan Ma

at Nanjing Univ

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Author

Publications (3)

Proceedings Article | 11 March 2008 Paper

High density Si nanodots: fabrication and properties

J. Xu, J. Zhou, X. Li, Z. Cen, D. Chen, W. Li, L. Xu, Z. Ma, K. Chen

Proceedings Volume 6984, 69840E (2008) https://doi.org/10.1117/12.792268

KEYWORDS: Silicon, Laser crystals, Laser irradiation, Crystals, Annealing, Visible radiation, Luminescence, Nanolithography, Silicon films, Nanostructures

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Proceedings Article | 11 March 2008 Paper

Fabrication and characterization of Si nanotip arrays for Si-based nano-devices

Xiangao Zhang, Kui Liu, Kunji Chen, Jun Xu, Zhongyuan Ma, Wei Li, Ling Xu, Xinfan Huang

Proceedings Volume 6984, 698426 (2008) https://doi.org/10.1117/12.792018

KEYWORDS: Silicon, Etching, Oxygen, Plasma, Reactive ion etching, Aluminum, Plasma etching, Electron beam lithography, Nanolithography, Scanning electron microscopy

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Proceedings Article | 8 December 2004 Paper

Visible photoluminescence originated from various mechanisms during step-by-step annealing

Jiaxin Mei, Yunjun Rui, Ling Yang, Jun Xu, Zhongyuan Ma, Da Zhu, Xinfan Huang, Kunji Chen

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.608168

KEYWORDS: Annealing, Luminescence, FT-IR spectroscopy, Silicon, Hydrogen, Oxygen, Absorption, Argon ion lasers, Lead, Plasma enhanced chemical vapor deposition

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