Zidong Li
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 6 March 2014 Paper
Proceedings Volume 8976, 89760B (2014) https://doi.org/10.1117/12.2040557
KEYWORDS: Microfluidics, Etching, Glasses, Robotics, Computer aided design, Optical lithography, Lithography, Oxygen, Liquids, Rapid manufacturing

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