KEYWORDS: Sensors, Signal processing, Signal detection, Data acquisition, Data processing, Light sources, Reliability, Optical testing, Digital signal processing, Field programmable gate arrays
The four-quadrant detector is mainly used in high-precision displacement measurement and other related fields. With the emergence of displacement problem in a large number of projects, the displacement measurement accuracy, speed and reliability have become increasingly demanding. In this paper, the measurement principle of four-quadrant detector is analyzed theoretically, the displacement measurement system based on four-quadrant detector is designed, and the experimental platform is built to test and validate the stability, measurement accuracy and range of the displacement measurement system. Experimental results show that: the deviation of the same spot position on measurement system is less than 0.17μm. The measurement error of spot displacement is less than 3.7μm.
KEYWORDS: Sensors, Signal detection, Nonuniformity corrections, Light sources, Light, Data conversion, Data processing, Information science, Information technology, Photodetectors
The four-quadrant detector is mainly used for high-precision position measurement and related fields, and the
requirement of accuracy keeps increasing. The effection of photoresponse nonuniformity on measurement accuracy of
four-quadrant detector is analyzed theoretically in this paper. The correction method is proposed through calculation,
simulation and analysis. Finally, the experimental platform is built to verify. The results of experiments demonstrate that
after compensated correction, the nonuniformity of detector has been 46.17% compensated, the nonlinear deviation has
been decreased by 44.1%, the measurement accuracy of spot displacement has been improved by 1.33 times.
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