Mr. Ziming Ren Profile

Ziming Ren

at Xi'an Jiaotong Univ

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 14 October 2020 Poster + Presentation

Stiffness adjustable optical MEMS accelerometer

Yonghong Qi, Yuxing Duan, Ziming Ren, Minghui Zhao, Zhuangde Jiang, Xueyong Wei

Proceedings Volume 11554, 1155418 (2020) https://doi.org/10.1117/12.2573644

KEYWORDS: Microelectromechanical systems, Actuators, Electrodes, Mechanical sensors, Optical resolution

Read Abstract +

MEMS accelerometer is one of the most popular sensors which is widely used in resource explorations, seismic measurements, structural monitoring, and consumer electronics as its good performance and low cost. However, the stiffness of the conventional accelerometers is fixed, which limits the bandwidth of the sensor, so that they are just used in specific applications. In this paper, a stiffness adjustable optical MEMS accelerometer based on electro-thermal actuator is proposed, whose stiffness can be adjusted over a large range by the electro-thermal actuator. The stiffness adjustment is just depending on the voltage applied on the electrodes, which changes the geometrical characteristic of the spring beams by exerting an axial compression displacement on them, enabling the device to neutralize its intrinsic positive stiffness, thus a neutrally stable quasi-zero stiffness region is obtained. The test results show that the first order resonant frequency of the accelerometer can be tuned to below 19 Hz from the unloaded state value of 500 Hz, which greatly changes the working bandwidth of the accelerometer. Combined with the high-resolution optical read-out scheme, the theoretically achievable system resolution can be μg levels. Therefore, the designed stiffness adjustable accelerometer can be used in different bandwidths application fields.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years