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Zouhir Mehrez
at CEA-LETI
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Publications (2)
Proceedings Article | 9 April 2024 Poster + Paper
Fabrication of 3D microstructures by controlled bending of suspended microdisks
Proceedings Volume 12956, 129560K (2024) https://doi.org/10.1117/12.3009898
KEYWORDS: Fabrication, 3D microstructuring, Silicon, Deformation, Bending stress, Tin, Microlens, Titanium, Atomic force microscopy
Proceedings Article | 27 May 2022 Presentation + Paper
Recent thermoresistive material evolutions at LYNRED for improving uncooled microbolometer products thermal sensitivity
Marc Guillaumont, Stéphane Altazin, Alexi Cardoso, Sébastien Tinnes, Claire Pistre, Alain Durand, Aurélien Dariel, Fabio Rossini, Clémence Laurent, Christine Fréal, Gérard Mandran, Christian Bellon, Sébastien Cortial, Matthieu Cueff, Christophe Pautet, Nicolas Boudou, Sarah Gays, Xavier Zucchi, Denis Pelenc, Jean-Jacques Yon, Wilfried Rabaud, Valérie Goudon, Claire Vialle, Stéphane Pocas, Delphine Brellier, Rachid Hida, Tony Jullien, Zouhir Mehrez, Elisa Vermande, Antoine Schembri, Pierre Brianceau
Proceedings Volume 12107, 1210716 (2022) https://doi.org/10.1117/12.2618494
KEYWORDS: Staring arrays, Microbolometers, Amorphous silicon, Sensors, Manufacturing, Signal to noise ratio, Amorphous semiconductors
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